Evaluation of Fracture Strength of Ceramics Containing Small Surface Defects Introduced by Focused Ion Beam

The aim of this study was to clarify the effects of micro surface defects introduced by the focused ion beam (FIB) technique on the fracture strength of ceramics. Three-point bending tests on alumina-silicon carbide (Al₂O₃/SiC) ceramic composites containing crack-like surface defects introduced by FIB were carried out. A surface defect with area in the range 19 to 35 µm was introduced at the center of each specimen. Test results showed that the fracture strengths of the FIB-defect specimens depended on area. The test results were evaluated using the evaluation equation of fracture strength based on the process zone size failure criterion and the area parameter model. The experimental results indicate that FIB-induced defects can be used as small initial cracks for the fracture strength evaluation of ceramics. Moreover, the proposed equation was useful for the fracture strength evaluation of ceramics containing micro surface defects introduced by FIB.